The metal palladium composite membrane hydrogen purification device jointly developed by Dalian Institute of Physics, Chinese Academy of Sciences and Dalian Huahai Hydrogen Production Equipment Co., Ltd. has recently completed a 200m3/h industrial demonstration. This technology solves the problem that trace and ultra-trace impurities are difficult to remove in the circulating hydrogen for polysilicon production.

This technology is a patented technology that Dalian Chemical Industry Co., Ltd. realizes industrialization at home and abroad. It can be applied to dozens of polysilicon companies in my country. It is useful for promoting electronic information, semiconductors, LED lighting and photovoltaic power generation. The development of strategic emerging industries is of great significance.

It is understood that in the polysilicon production process, various ultra-trace metal impurities (ppb level) brought in by the raw materials will be deposited on the polysilicon, which will have a great impact on product quality However, traditional pressure swing adsorption and cryogenic technology are difficult to further remove these trace and ultra-trace impurities. The metal palladium composite membrane can effectively intercept these impurities, reducing the content of various impurities by more than a hundred times, thereby greatly improving the purity and quality of polysilicon products.

The on-site demonstration results also show that by purifying the circulating hydrogen, the quality of polysilicon can reach electronic grade standards. For methane or nitrogen whose content in circulating hydrogen sometimes increases suddenly, the purification device can continuously remove it from the system, so that the hydrogen quality of the large-cycle system can be significantly improved. The purified hydrogen is used to produce polysilicon, and the metal impurity content in the product is relatively stable, indicating that the purifier can play a role in ensuring the stable production of polysilicon.